O pó de carboneto de silício verde (SiC) utilizado no polimento de pastilhas semicondutoras é um material essencial. É amplamente utilizado em processos de polimento de precisão devido à sua elevada dureza, excelente estabilidade química e estabilidade térmica.
1. Características do carboneto de silício verde
—Elevada dureza (dureza de Mohs 9,2): só perde para o diamante e para o nitreto cúbico de boro, adequado para processar materiais duros (como o silício, as pastilhas de carboneto de silício).
—Inércia química: não reage com ácidos e álcalis à temperatura ambiente para evitar a contaminação da superfície do wafer.
—Estabilidade térmica: ainda pode manter o desempenho a altas temperaturas, adequado para polimento a alta velocidade.
–Formato de partículas afiado: proporciona uma capacidade de corte eficiente, mas a uniformidade das partículas necessita de ser controlada para evitar riscos.
| ANÁLISE QUÍMICA TÍPICA | |
| SiC | ≥99,05% |
| SiO2 | ≤0,20% |
| F,Si | ≤0,03% |
| Fe2O3 | ≤0,10% |
| FC | ≤0,04% |
| PROPRIEDADES FÍSICAS TÍPICAS | |
| Dureza: | Mohs：9,5 |
| Ponto de fusão: | Sublima a 2600 ℃ |
| Temperatura máxima de serviço: | 1900℃ |
| Peso Específico: | 3,20-3,25 g/cm3 |
| Densidade aparente (LPD): | 1,2-1,6 g/cm3 |
| Cor: | Verde |
| Forma da partícula: | Hexagonal |
2. Aplicação em polimento de semicondutores
—Estágio de polimento bruto: utilizado para remover defeitos maiores ou vestígios de processamento na superfície do wafer (como camadas danificadas após fatiamento e moagem).
—Polimento das pastilhas de carboneto de silício (SiC): O carboneto de silício verde corresponde à dureza dos materiais das pastilhas de SiC para reduzir os danos na superfície.
—Aplicações auxiliares: utilizado para polir materiais duros e quebradiços, como substratos de safira e vidro ótico.
3. Principais requisitos de qualidade
— Distribuição do tamanho das partículas: necessita de ser altamente uniforme (como D50 1–5 μm) para evitar riscos causados por partículas grandes.
—Pureza: elevada pureza (≥99,9%) para reduzir a contaminação por impurezas metálicas (como Fe, Al).
—Morfologia da partícula: necessita de ser esférica ou equiárea para reduzir a rugosidade da superfície.
—Suspensão: dispersão estável no líquido de polimento para evitar a sedimentação.
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